@article{article, title  = {{Interactions of indium, arsenic and carbon in silicon using the pseudopotential technique}},

 url = {{}},

 year = {{2011}},

 month = {{3}},

 author = {{Shishkin M and Yan A and De Souza MM}},

 volume = {{810}},

 journal = {{SILICON FRONT-END JUNCTION FORMATION-PHYSICS AND TECHNOLOGY}},

 pages = {{333-338}},

 note = {{Accessed on 2025/01/13}}}