@inbook{inbook, title  = {{Nanolithography}},

 publisher = {{John Wiley & Sons, Ltd}},

 url = {{}},

 year = {{2012}},

 month = {{3}},

 author = {{Leggett GJ}},

 doi = {{10.1002/9780470661345.smc193}},

 isbn = {{9780470746400}},

 note = {{Accessed on 2024/10/23}}}