@inproceedings{inproceedings, title  = {{A study of indium activation in silicon using pseudopotential calculations}},

 url = {{}},

 year = {{2004}},

 month = {{1}},

 author = {{Yan X and Shishkin M and De Souza MM and ieee}},

 journal = {{2004 24TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, PROCEEDINGS, VOLS 1 AND 2}},

 pages = {{283-286}},

 note = {{Accessed on 2024/12/26}}}