TY  - CONF

T1  - 3D determination of a MOSFET gate morphology by FIB tomography

JO  - MICROSCOPY OF SEMICONDUCTING MATERIALS 2003

UR  - http://eprints.whiterose.ac.uk/148197/

PY  - 2003/01/01

AU  - Inkson BJ

AU  - Olsen S

AU  - Norris DJ

AU  - O'Neill AG

AU  - Mobus G

ED  - Cullis AG

ED  - Midgley PA

IS  - 180

SP  - 611

EP  - 616

Y2  - 2025/01/13

ER  -