TY  - JOUR

T1  - Atomic Layer Epitaxy

JO  - Surface Engineering

PY  - 1987/01/01

AU  - Simpson M

AU  - Dederski GA

AU  - Smith P

ED  - 

PB  - Maney Publishing

VL  - 3

IS  - 4

SP  - 343

EP  - 348

Y2  - 2025/01/13

ER  -