TY  - JOUR

T1  - XTEM characterization of modulated ion implantation through self-organized anodic aluminum oxide (AAO) membranes

JO  - Materials Research Society Symposium Proceedings

PY  - 2011/01/01

AU  - Guan W

AU  - Ghatak J

AU  - Peng N

AU  - Peng Y

AU  - Jeynes C

AU  - Möbus G

ED  - 

DO  - DOI: 10.1557/opl.2012.757

VL  - 1411

SP  - 49

EP  - 54

Y2  - 2024/12/26

ER  -