TY - JOUR T1 - Impact of a nonideal metal gate on surface optical phonon-limited mobility in high-κ gated MOSFETs JO - IEEE Transactions on Electron Devices PY - 2007/11/01 AU - Shah R AU - De Souza MM ED - DO - DOI: 10.1109/TED.2007.907135 VL - 54 IS - 11 SP - 2991 EP - 2997 Y2 - 2024/10/23 ER -