TY - JOUR T1 - Fabrication and characterisation of embedded metal nanostructures by ion implantation with nanoporous anodic alumina masks JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms PY - 2013/01/01 AU - Guan W AU - Peng N AU - Jeynes C AU - Ghatak J AU - Peng Y AU - Ross IM AU - Bhatta UM AU - Inkson BJ AU - Möbus G ED - DO - DOI: 10.1016/j.nimb.2013.02.046 PB - Elsevier BV VL - 307 SP - 273 EP - 276 Y2 - 2024/12/26 ER -