@inproceedings{inproceedings, title  = {{TEM analysis of dual column FIB processed Si/SiGe MOSFET device structures}},

 url = {{}},

 year = {{2004}},

 month = {{1}},

 author = {{Chang ACK and Ross IM and Norris D and Cullis AG}},

 journal = {{ELECTRON MICROSCOPY AND ANALYSIS 2003}},

 issue = {{179}},

 pages = {{371-374}},

 note = {{Accessed on 2024/12/26}}}