TY  - JOUR

T1  - Characterization of arc discharge plasmas in the combined steered arc/unbalanced magnetron deposition process

JO  - Proceedings, Annual Technical Conference - Society of Vacuum Coaters

PY  - 2001/01/01

AU  - Ehiasarian AP

AU  - Macak KA

AU  - Schönjahn C

AU  - New R

AU  - Münz WD

ED  - 

SP  - 382

EP  - 387

Y2  - 2024/12/26

ER  -