TY  - CONF

T1  - Optimization of in situ substrate surface treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics

JO  - JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS

PY  - 2001/07/01

AU  - Schonjahn C

AU  - Ehlasarian AP

AU  - Lewis DB

AU  - New R

AU  - Munz WD

AU  - Twesten RD

AU  - Petrov I

ED  - 

VL  - 19

IS  - 4

SP  - 1415

EP  - 1420

Y2  - 2024/12/26

ER  -