TY - CONF T1 - Fabrication of sub-diffraction-limit molecular structures by scanning near-field photolithography - art. no. 664513 JO - Nanoengineering: Fabrication, Properties, Optics, and Devices IV PY - 2007/01/01 AU - Ducker RE AU - Montague MT AU - Sun S AU - Leggett GJ ED - Dobisz EA ED - Eldada LA DO - DOI: 10.1117/12.735801 VL - 6645 SP - 64513 EP - 64513 Y2 - 2024/10/23 ER -