@article{article, title = {{Low-Dimensional Waveguide Grating Fabrication in GaN with Use of SiCl4/Cl2/Ar-Based Inductively Coupled Plasma Dry Etching}}, publisher = {{Springer Science and Business Media LLC}}, url = {{}}, year = {{2009}}, month = {{5}}, author = {{Dylewicz R and Patela S and Hogg RA and Fry PW and Parbrook PJ and Airey R and Tahraoui A}}, doi = {{10.1007/s11664-009-0731-5}}, volume = {{38}}, journal = {{Journal of Electronic Materials}}, issue = {{5}}, pages = {{635-639}}, note = {{Accessed on 2025/04/05}}}