@article{article, title  = {{Subsurface nanoindentation deformation of Cu-Al multilayers mapped in 3D by focused ion beam microscopy.}},

 url = {{}},

 year = {{2001}},

 month = {{2}},

 author = {{Inkson BJ and Steer T and Möbus G and Wagner T}},

 doi = {{10.1046/j.1365-2818.2001.00767.x}},

 volume = {{201}},

 journal = {{J Microsc}},

 issue = {{2}},

 pages = {{256-269}},

 note = {{Accessed on 2024/12/26}}}