TY - JOUR T1 - 3-D focused ion beam mapping of nanoindentation zones in a Cu-Ti multilayered coating JO - THIN SOLID FILMS PY - 2002/06/24 AU - Steer TJ AU - Mobus G AU - Kraft O AU - Wagner T AU - Inkson BJ ED - VL - 413 IS - 1-2 SP - 147 EP - 154 Y2 - 2025/01/13 ER -