TY - JOUR T1 - Influence of phosphorus and hydrogen ion implantation on the photoluminescence of SiO2 with Si nanoinclusions JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms PY - 2001/01/01 AU - Tetelbaum DI AU - Trushin SA AU - Burdov VA AU - Golovanov AI AU - Revin DG AU - Gaponova DM ED - DO - DOI: 10.1016/S0168-583X(00)00457-2 VL - 174 IS - 1-2 SP - 123 EP - 129 Y2 - 2024/12/26 ER -