@inproceedings{inproceedings, title  = {{Experimental study of the impact of so phonon scattering in high-κ gate dielectric MOSFETs}},

 url = {{}},

 year = {{2006}},

 month = {{1}},

 author = {{Atarah SA and De Souza MM and Peterson J and Bersuker G and Brown G and Young C}},

 doi = {{10.1149/1.2355698}},

 volume = {{3}},

 journal = {{ECS Transactions}},

 issue = {{3}},

 pages = {{49-56}},

 note = {{Accessed on 2025/01/13}}}