TY  - JOUR

T1  - A quantitative study of compositional profiles of chemical vapour-deposited strained silicon-germanium/silicon layers by transmission electron microscopy

JO  - Journal of Crystal Growth

PY  - 1999/01/01

AU  - Walther T

AU  - Humphreys CJ

ED  - 

DO  - DOI: 10.1016/S0022-0248(98)00930-0

VL  - 197

IS  - 1-2

SP  - 113

EP  - 128

Y2  - 2024/10/23

ER  -