TY - JOUR T1 - TEM studies of RF magnetron-sputtered thin films JO - Journal of Materials Science: Materials in Electronics PY - 1992/03/01 AU - Reaney IM AU - Barber DJ AU - Watton R ED - DO - DOI: 10.1007/BF00701095 VL - 3 IS - 1 SP - 51 EP - 63 Y2 - 2025/04/12 ER -