TY  - CHAP

T1  - Photolithography beyond the diffraction limit

T2  - Nanolithography and Patterning Techniques in Microelectronics

PY  - 2005/01/01

AU  - Leggett GJ

ED  - 

DO  - DOI: 10.1533/9781845690908.238

SN  - 9781855739314

SP  - 238

EP  - 266

Y2  - 2024/10/23

ER  -