@inbook{inbook, title  = {{Photolithography beyond the diffraction limit}},

 url = {{}},

 year = {{2005}},

 month = {{1}},

 author = {{Leggett GJ}},

 doi = {{10.1533/9781845690908.238}},

 isbn = {{9781855739314}},

 pages = {{238-266}},

 note = {{Accessed on 2024/12/26}}}