@inproceedings{inproceedings, title = {{A new Gaussian process-based approach for uncertainty propagation in surface metrology profile parameters estimation}}, url = {{}}, year = {{2019}}, month = {{1}}, author = {{Obajemu O and Mahfouf M and McLeay TE and Jiang X and Scott PJ and Kadirkamanathan V}}, journal = {{European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019}}, pages = {{520-523}}, note = {{Accessed on 2025/04/05}}}