@inproceedings{inproceedings, title = {{Determining Buried Wetting Layer Thicknesses to Sub-Monolayer Precision by Linear Regression Analysis of Series of Spectra}}, url = {{}}, year = {{2008}}, month = {{1}}, author = {{Walther T}}, volume = {{120}}, journal = {{MICROSCOPY OF SEMICONDUCTING MATERIALS 2007}}, pages = {{247-250}}, note = {{Accessed on 2024/10/22}}}