TY  - JOUR

T1  - A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope

JO  - Journal of Micromechanics and Microengineering

PY  - 2014/10/29

AU  - Hu ZX

AU  - Gallacher BJ

AU  - Burdess JS

AU  - Bowles SR

AU  - Grigg HTD

ED  - 

DO  - DOI: 10.1088/0960-1317/24/12/125003

PB  - IOP Publishing

VL  - 24

IS  - 12

SP  - 125003

EP  - 125003

Y2  - 2024/12/27

ER  -