@article{article, title  = {{A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope}},

 publisher = {{IOP Publishing}},

 url = {{}},

 year = {{2014}},

 month = {{10}},

 author = {{Hu ZX and Gallacher BJ and Burdess JS and Bowles SR and Grigg HTD}},

 doi = {{10.1088/0960-1317/24/12/125003}},

 volume = {{24}},

 journal = {{Journal of Micromechanics and Microengineering}},

 issue = {{12}},

 pages = {{125003-125003}},

 note = {{Accessed on 2024/12/27}}}