TY - CONF T1 - Experimental study of the impact of SO phonon scattering in high-κ gate dielectric MOSFETs CY - Cancun JO - 210th Transactions of the Electrochemical society PY - 2006/01/01 AU - Atarah SA AU - De Souza MM AU - Peterson J AU - Bersuker G AU - Brown G ED - VL - 3 Y2 - 2024/10/23 ER -