@inproceedings{inproceedings, title = {{Chemical Etching of Diamond Revisited: Past Basic Research as Guide to New Processing Technologies}}, publisher = {{Cambridge University Press (CUP)}}, url = {{}}, year = {{1998}}, month = {{1}}, author = {{Cherian KA and Litster J and Rudolph V and White ET}}, doi = {{10.1557/proc-495-419}}, volume = {{495}}, journal = {{MRS Proceedings}}, note = {{Accessed on 2024/12/26}}}