@inproceedings{inproceedings, title = {{On the structure and oxidation mechanisms in nanoscale hard coatings}}, url = {{}}, year = {{2006}}, month = {{1}}, author = {{Rainforth WM and Zhou Z}}, doi = {{10.1088/1742-6596/26/1/021}}, volume = {{26}}, journal = {{EMAG-NANO 2005: Imaging, Analysis and Fabrication on the Nanoscale}}, pages = {{89-94}}, note = {{Accessed on 2024/12/26}}}