@inproceedings{inproceedings, title  = {{Quantitative Dopant Profiling in the SEM Including Surface States}},

 url = {{}},

 year = {{2008}},

 month = {{1}},

 author = {{Chee KWA and Rodenburg C and Humphreys CJ}},

 volume = {{120}},

 journal = {{MICROSCOPY OF SEMICONDUCTING MATERIALS 2007}},

 pages = {{407-410}},

 note = {{Accessed on 2025/01/13}}}