TY  - JOUR

T1  - An interpretable machine learning based approach for process to areal surface metrology informatics

JO  - Surface Topography: Metrology and Properties

PY  - 2021/12/01

AU  - Obajemu O

AU  - Mahfouf M

AU  - Papananias M

AU  - McLeay TE

AU  - Kadirkamanathan V

ED  - 

DO  - DOI: 10.1088/2051-672x/ac28a7

PB  - IOP Publishing

VL  - 9

IS  - 4

Y2  - 2024/10/23

ER  -