@article{article, title  = {{An interpretable machine learning based approach for process to areal surface metrology informatics}},

 publisher = {{IOP Publishing}},

 url = {{}},

 year = {{2021}},

 month = {{12}},

 author = {{Obajemu O and Mahfouf M and Papananias M and McLeay TE and Kadirkamanathan V}},

 doi = {{10.1088/2051-672x/ac28a7}},

 volume = {{9}},

 journal = {{Surface Topography: Metrology and Properties}},

 issue = {{4}},

 note = {{Accessed on 2024/12/25}}}