@inproceedings{inproceedings, title  = {{Use of wafer backside inspection and SPR to address systemic tool and process issues}},

 publisher = {{SPIE}},

 url = {{}},

 year = {{2010}},

 month = {{12}},

 author = {{Carlson A and Bachiraju P and Clark J and Trost D}},

 doi = {{10.1117/12.846688}},

 journal = {{Metrology, Inspection, and Process Control for Microlithography XXIV}},

 note = {{Accessed on 2024/10/23}}}