TY  - JOUR

T1  - Substrate ion etching in combined steered cathodic arc-UBM deposition system: Effects on interface architecture, adhesion, and tool performance

JO  - SURFACE ENG

PY  - 2000/01/01

AU  - Schonjahn C

AU  - Lewis DB

AU  - Munz WD

AU  - Petrov I

ED  - 

VL  - 16

IS  - 2

SP  - 176

EP  - 180

Y2  - 2024/12/26

ER  -