@article{article, title  = {{Substrate ion etching in combined steered cathodic arc-UBM deposition system: Effects on interface architecture, adhesion, and tool performance}},

 url = {{}},

 year = {{2000}},

 month = {{1}},

 author = {{Schonjahn C and Lewis DB and Munz WD and Petrov I}},

 volume = {{16}},

 journal = {{SURFACE ENG}},

 issue = {{2}},

 pages = {{176-180}},

 note = {{Accessed on 2024/12/26}}}