TY  - JOUR

T1  - Matching the resolution of electron beam lithography by scanning near-field photolithography

JO  - NANO LETT

PY  - 2004/08/01

AU  - Sun S

AU  - Leggett GJ

ED  - 

DO  - DOI: 10.1021/nl049540a

VL  - 4

IS  - 8

SP  - 1381

EP  - 1384

Y2  - 2024/10/23

ER  -