@inproceedings{inproceedings, title  = {{Effect of experimental parameters on doping contrast of Si p-n junctions in a FEG-SEM}},

 url = {{}},

 year = {{2004}},

 month = {{6}},

 author = {{Kazemian P and Rodenburg C and Humphreys CJ}},

 doi = {{10.1016/j.mee.2004.03.080}},

 volume = {{73-74}},

 journal = {{MICROELECTRONIC ENGINEERING}},

 pages = {{948-953}},

 note = {{Accessed on 2025/01/13}}}