TY  - CONF

T1  - High resolution dopant profiling in the SEM, image widths and surface band-bending - art. no. 012033

JO  - EMAG: ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2007

PY  - 2008/01/01

AU  - Chee KWA

AU  - Rodenburg C

AU  - Humphreys CJ

ED  - Baker RT

ED  - Mobus G

ED  - Brown PD

VL  - 126

SP  - 12033

EP  - 12033

Y2  - 2024/12/26

ER  -