TY  - JOUR

T1  - Defect interaction mechanisms between antimony and indium in silicon

JO  - GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XI

PY  - 2005/01/01

AU  - De Souza MM

AU  - Chakravarthi S

AU  - Jain A

ED  - 

VL  - 108-109

SP  - 425

EP  - 430

Y2  - 2024/10/23

ER  -