@article{article, title = {{Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns}}, url = {{}}, year = {{2001}}, month = {{6}}, author = {{Kok P and Boto AN and Abrams DS and Williams CP and Braunstein SL and Dowling JP}}, volume = {{63}}, journal = {{Physical Review A. Atomic, Molecular, and Optical Physics}}, issue = {{6}}, note = {{Accessed on 2024/12/26}}}