TY  - JOUR

T1  - PARTICULATE CONTAMINATION IN SILICON GROWN BY MOLECULAR-BEAM EPITAXY

JO  - JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

PY  - 1990/01/01

AU  - PINDORIA G

AU  - HOUGHTON RF

AU  - HOPKINSON M

AU  - WHALL T

AU  - KUBIAK RAA

AU  - PARKER EHC

ED  - 

DO  - DOI: 10.1116/1.584860

VL  - 8

IS  - 1

SP  - 21

EP  - 27

Y2  - 2024/12/25

ER  -