@article{article, title = {{PARTICULATE CONTAMINATION IN SILICON GROWN BY MOLECULAR-BEAM EPITAXY}}, url = {{}}, year = {{1990}}, month = {{1}}, author = {{PINDORIA G and HOUGHTON RF and HOPKINSON M and WHALL T and KUBIAK RAA and PARKER EHC}}, doi = {{10.1116/1.584860}}, volume = {{8}}, journal = {{JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B}}, issue = {{1}}, pages = {{21-27}}, note = {{Accessed on 2024/12/25}}}