TY  - CONF

T1  - EELS and ELNES studies of nano-scale nitride multilayers deposited by unbalanced magnetron sputtering

JO  - Journal of Physics: Conference Series

PY  - 2010/01/01

AU  - Seabourne CR

AU  - Ross IM

AU  - Rainforth WM

AU  - Scott AJ

AU  - Mendis BG

AU  - Eh Hovespian PE

ED  - 

DO  - DOI: 10.1088/1742-6596/241/1/012046

VL  - 241

Y2  - 2024/10/24

ER  -