TY  - CONF

T1  - Nature of hot carrier damage in Spacer oxide of LDD n-MOSFETs

JO  - 2002 23RD INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS

PY  - 2002/01/01

AU  - Manhas SK

AU  - Sekhar DC

AU  - Oates AS

AU  - De Souza MM

AU  - IEEE

AU  - IEEE

ED  - 

SP  - 735

EP  - 739

Y2  - 2024/12/26

ER  -