@article{article, title  = {{Fabrication of v-groove gratings in InP by inductively coupled plasma etching with SiCl4/Ar}},

 url = {{}},

 year = {{2006}},

 month = {{1}},

 author = {{Kennedy K and Groom KM and Hogg RA}},

 doi = {{10.1088/0268-1242/21/1//L01}},

 volume = {{21}},

 journal = {{SEMICOND SCI TECH}},

 issue = {{1}},

 pages = {{L1-L5}},

 note = {{Accessed on 2024/12/26}}}