TY - JOUR T1 - 3D reconstruction of SPM probes by electron tomography JO - Journal of Physics: Conference Series PY - 2007/01/01 AU - Xu X AU - Peng Y AU - Saghi Z AU - Gay R AU - Inkson BJ AU - Möbus G ED - DO - DOI: 10.1088/1742-6596/61/1/162 VL - 61 IS - 1 SP - 810 EP - 814 Y2 - 2025/01/13 ER -