@article{article, title  = {{3D reconstruction of SPM probes by electron tomography}},

 url = {{}},

 year = {{2007}},

 month = {{1}},

 author = {{Xu X and Peng Y and Saghi Z and Gay R and Inkson BJ and Möbus G}},

 doi = {{10.1088/1742-6596/61/1/162}},

 volume = {{61}},

 journal = {{Journal of Physics: Conference Series}},

 issue = {{1}},

 pages = {{810-814}},

 note = {{Accessed on 2025/01/13}}}