TY - CONF T1 - EELS and ELNES studies of nano-scale nitride multilayers deposited by unbalanced magnetron sputtering JO - Journal of Physics: Conference Series PY - 2010/01/01 AU - Seabourne CR AU - Ross IM AU - Rainforth WM AU - Scott AJ AU - Mendis BG AU - Eh Hovespian PE ED - DO - DOI: 10.1088/1742-6596/241/1/012046 VL - 241 Y2 - 2024/12/26 ER -