TY  - JOUR

T1  - Energy filtered scanning electron microscopy: Applications to dopant contrast

JO  - Journal of Physics: Conference Series

PY  - 2010/01/01

AU  - Rodenburg C

AU  - Jepson E

AU  - Inkson J

AU  - Bosch E

AU  - Chee W

AU  - Humphreys J

ED  - 

DO  - DOI: 10.1088/1742-6596/209/1/012053

VL  - 209

Y2  - 2025/01/13

ER  -