@article{article, title = {{Planar InAs photodiodes fabricated using He ion implantation}}, url = {{http://eprints.whiterose.ac.uk/76168/ }}, year = {{2012}}, month = {{1}}, author = {{Sandall I and Tan CH and Smith A and Gwilliam R}}, doi = {{10.1364/OE.20.008575}}, volume = {{20}}, journal = {{Optics Express}}, issue = {{8}}, pages = {{8575-8583}}, note = {{Accessed on 2024/10/23}}}