@article{article, title = {{Electron tomography of SPM probes, nanoparticles and precipitates}}, url = {{}}, year = {{2006}}, month = {{1}}, author = {{Xu X and Saghi Z and Yang G and Peng Y and Inkson B and Gay R and Möbus G}}, doi = {{10.1557/proc-0982-kk02-04}}, volume = {{982}}, journal = {{Materials Research Society Symposium Proceedings}}, pages = {{13-18}}, note = {{Accessed on 2024/12/26}}}